Thermodynamics Research Center / ThermoML | Journal of Chemical and Engineering Data

Density, Viscosity, and Thermal Conductivity of Electronic Grade Phosphoric Acid

Jiang, X.[Xiaobin], Zhao, Y.[Yingying], Hou, B.[Baohong], Zhang, M.[Meijing], Bao, Y.[Ying]
J. Chem. Eng. Data 2011, 56, 2, 205-211
ABSTRACT
The densities and viscosities of electronic grade phosphoric acid (EGPA) aqueous solutions with the mass fraction of H3PO4 in the range of (78.7 to 90.2) % and temperatures from (283.15 to 313.15) K were measured. The densities range from (1.606 to 1.758) g*cm-3 with the mass fraction in the range of (78.7 to 90.2) % under experimental temperature. The viscosities range from (14.63 to 134.56) mPa*s with the mass fraction in the range of (78.7 to 90.2) % under experimental temperature. It is found that the measured densities and viscosities are well-correlated with the temperature and mass fraction of H3PO4 and are fitted to the regression equations. The thermal conductivities of EGPA coarse crystal (mixture of H3PO4*0.5H2O crystal and phosphoric acid aqueous solution) with the initial mass fraction of H3PO4 in the range of (84.2 to 90) % and temperatures from (280.15 to 298.15) K were measured by the cooling rate of 2 K*h-1 with a total cooling of (3 to 4) K under the initial temperature, which simulated the operation curve in industrial application. The result shows that the thermal conductivity under this condition increases obviously when the temperature rises. The thermal conductivity decreases when the initial mass fraction of H3PO4 increases.
Compounds
# Formula Name
1 H3O4P phosphoric acid
2 H2O water
Datasets
The table above is generated from the ThermoML associated json file (link above). POMD and RXND refer to PureOrMixture and Reaction Datasets. The compound numbers are included in properties, variables, and phases, if specificied; the numbers refer to the table of compounds on the left.
Type Compound-# Property Variable Constraint Phase Method #Points
  • POMD
  • 1
  • 2
  • Viscosity, Pa*s ; Liquid
  • Temperature, K; Liquid
  • Mass fraction - 1; Liquid
  • Pressure, kPa; Liquid
  • Liquid
  • CAPTUB:UFactor:16
  • 56
  • POMD
  • 1
  • 2
  • Mass density, kg/m3 ; Liquid
  • Temperature, K; Liquid
  • Mass fraction - 1; Liquid
  • Pressure, kPa; Liquid
  • Liquid
  • Pycnometric method
  • 56