The vapor pressure of di-tert-butylsilane [CAS Registry No. 30736-07-3] to be used in metalorganic vapor phase epitaxy (MOVPE) was measured by a static method in the technologically important temperature range from (241 to 288) K. The experimental data were fitted by the Antoine equation. To the best of our knowledge, this is the first time that the vapor pressure measurements of di-tert-butylsilane are reported.
Compounds
#
Formula
Name
1
C8H20Si
di-tert-butylsilane
Datasets
The table above is generated from the ThermoML associated json file (link above).
POMD and RXND refer to PureOrMixture and Reaction Datasets. The compound numbers are included in properties, variables, and phases, if specificied;
the numbers refer to the table of compounds on the left.