Thermodynamics Research Center / ThermoML | Thermochimica Acta

Thermal analysis and vapour pressure of a new series of tungsten(VI) oxo-alkoxide- -ketoesterate complex precursors for the chemical vapour deposition of tungsten oxide

Kunte, C. V., Shivashankar, S. A., Umarji, A. M.
Thermochim. Acta 2008, 474, 1-2, 12-15
ABSTRACT
A newseries of tungsten complexes, tungsten(VI) oxo-alkoxide- -ketoesterate complexes have been synthesized and characterized by infrared and NMR spectroscopy. Thermogravimetric analysis has been carried out on the complexes as a function of temperature, and isothermally as a function of time. Based on the thermal analysis data, these complexes are evaluated for their suitability as precursors for the chemical vapour deposition of tungsten oxide thin films. The vapour pressure of these precursors is estimated using the Langmuir equation.
Compounds
# Formula Name
1 C17H34O7W oxotungsten, [methyl 3-oxobutanoato], tris(2-methyl-2-propanolato)
2 C18H36O7W oxotungsten, [ethyl 3-oxobutanoato], tris(2-methyl-2-propanolato)
Datasets
The table above is generated from the ThermoML associated json file (link above). POMD and RXND refer to PureOrMixture and Reaction Datasets. The compound numbers are included in properties, variables, and phases, if specificied; the numbers refer to the table of compounds on the left.
Type Compound-# Property Variable Constraint Phase Method #Points
  • POMD
  • 1
  • Molar enthalpy of transition or fusion, kJ/mol ; Crystal
  • Temperature, K; Crystal
  • Crystal
  • Gas
  • Derived by Second law
  • 1
  • POMD
  • 2
  • Molar enthalpy of transition or fusion, kJ/mol ; Crystal
  • Temperature, K; Crystal
  • Crystal
  • Gas
  • Derived by Second law
  • 1