Thermodynamics Research Center / ThermoML | Journal of Chemical Thermodynamics

Vapour pressure measurement of metal organic precursors used for MOVPE

Fulem, M., Ruzicka, K., Ruzicka, V.[Vlastimil], Simecek, T.[Tomislav], Hulicius, E.[Eduard], Pangrac, J.[Jiri]
J. Chem. Thermodyn. 2006, 38, 3, 312-322
ABSTRACT
The paper presents methodology of vapour pressure measurement of metal organic precursors, describes two static apparatuses for vapour pressure measurement that have recently been constructed in the authors' laboratory, discusses handling and preparation of metal organic precursors prior to vapour pressure measurement by a static method and briefly presents the method of simultaneous treatment of vapour pressure and thermal data. New vapour pressure data of triethylantimony [CAS RN: 617-85-6] in the temperature range from 238 K to 309 K are reported. Parameters of the Antoine and of the Cox equations for trimethylgallium CAS RN: 1445-79-0] and trimethylaluminium [CAS RN: 75-24-1] are reported that were derived from the most reliable vapour pressure data and the related thermal data using simultaneous multi-property correlation.
Compounds
# Formula Name
1 C6H15Sb triethylstibine
Datasets
The table above is generated from the ThermoML associated json file (link above). POMD and RXND refer to PureOrMixture and Reaction Datasets. The compound numbers are included in properties, variables, and phases, if specificied; the numbers refer to the table of compounds on the left.
Type Compound-# Property Variable Constraint Phase Method #Points
  • POMD
  • 1
  • Vapor or sublimation pressure, kPa ; Liquid
  • Temperature, K; Liquid
  • Liquid
  • Gas
  • Closed cell (Static) method
  • 63